The Nanofabrication Facility

The Nanofabrication Facility is a one-of-a-kind university resource in Pennsylvania. It is a state-of-the-art, fully equipped national facility for micro- and nanofabrication and is part of the federal government's National Nanotechnology Infrastructure Network. The Penn State Nanofabrication Facility has a professional engineering staff, Class Ten cleanrooms, and a broad spectrum of processing equipment. The Nanofabrication Facility serves the Commonwealth through the Nanofabrication Manufacturing Technology program and serves the national university and industry communities through research, development, and prototyping activities requiring micro- and nanofabrication techniques.

For further information on the Nanofabrication Facility and a virtual tour are available at www.nanofab.psu.edu.

Webcast:

• Design and Implementation of an Educational Laboratory for Nanofabrication Manufacturing Technology

The 32-million-dollar equipment base for nanofabrication at Penn State's facility includes:

• electron beam lithography and optical lithography
• plasma etching tools
• plasma deposition tools
• physical vapor deposition equipment
• chemical vapor deposition equipement